Flexure-Guided Actuators - Piezo-Driven

Flexure-guided piezo actuators, also called flextensional actuators, combine piezo stack drives with frictionless flexure motion amplifiers. They provide nanometer precision, fast response, high stiffness, and maintenance-free operation over travel ranges from tens of micrometers up to 1 millimeter.

What Are Flexure-Guided Actuators with Piezo Drives Used For?

Piezo flexure-guided actuators provide nanometer precision, fast response, and travel ranges to 1000 µm and more. They are completely frictionless, require no lubricants or maintenance, and can achieve lifetimes of several billion cycles.

PI provides open-loop flextensional actuators for applications where absolute position is not critical, and closed-loop actuators with internal position sensors for nanometer repeatability. Typical applications include microfluidics, fast medical pumps, microdispensing, optics, biotech devices, servo valves, nanopositioning tables, and compact precision automation systems.

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Flexure-Guided Piezo Linear Actuators

Low-Cost Piezo Flexure Linear Actuator

Flextensional piezo actuator with integrated motion amplifier
Cost-effective design
Sub-millisecond responsiveness
Maintenance-free: no lubricants, no wear and tear
Frictionless, high-precision flexure guiding system
Positioning ranges to 500 µm
Ceramic encapsulated piezo actuators for outstanding lifetime
Closed-loop option for highest precision
Custom designs feasible
Target applications: optics, medical, biotech and microfluidics
Smaller, lower-cost P-604 OEM actuator available

These piezo flexure linear actuators were designed for cost-sensitive OEM applications. The integrated flexure guides save the cost of additional guiding systems when integrating the actuators into micro-dispensing devices, pumps or servo valves.

PDF Brochure | Piezo Flexure Actuator Specs & Order Info

Compact Flexure-Guided Actuator, Piezo Direct-Drive

Ultra-high precision flextensional actuator with direct drive
50 picometer resolution, rapid response
Capacitive sensor feedback for highest linearity and precision
Frictionless precision flexure guidance for ultra-straight motion
Ceramic encapsulated piezo actuators for outstanding lifetime
Vacuum-compatible and nonmagnetic versions available

These high-speed nanopositioners can be used as both linear actuators and linear translation stages. They are equipped with capacitive position feedback sensors, frictionless flexure guiding systems, and high-performance piezo drives, providing positioning and scanning ranges up to 38 µm with very fast settling time and extremely straight motion.

PDF Brochure | Piezo Flexure Actuator Specs & Order Info

Compact, Motion-Amplified Flextensional Actuator 400 µm Positioning Range

Flextensional Z-actuator with integrated motion amplifier
Target applications: optics, medical, biotech and microfluidics
Maintenance-free: no lubricants, no wear and tear
Sub-millisecond responsiveness
To 400 µm positioning range
Flexure guidance for frictionless, ultra-straight motion
Sub-nanometer resolution
High stiffness for high dynamics
Non-magnetic versions feasible
Ceramic encapsulated piezo actuators for outstanding lifetime
Closed-loop option for highest precision

These motion-amplified, flexure-guided piezo actuators provide large vertical positioning ranges to 400 µm, fast response, and high positioning accuracy in a very small package. With settling times of only a few milliseconds and sub-nanometer resolution, they are well suited for static and dynamic applications.

PDF Brochure | Piezo Flexure Actuator Specs & Order Info

Custom, High-Force, Long Travel Flexure Actuators: up to 1mm Positioning Ranges

Flextensional piezo actuator with integrated motion amplifier
Maintenance-free: no lubricants, no wear and tear
Sub-millisecond responsiveness
Choice of positioning ranges from 100 µm to 1000 µm
Frictionless motion amplifier and flexure guiding system for straight motion
High dynamics and stiffness, forces to 400 N, backlash-free construction
Ceramic encapsulated piezo actuators for outstanding lifetime
Closed-loop option for highest precision
Custom designs with larger travel, faster response, and non-magnetic versions feasible
Target applications: optics, medical, biotech and microfluidics

These custom flexure-guided piezo actuators integrate a frictionless, high-efficiency motion amplifier to combine positioning ranges up to 1 millimeter with high stiffness and very fast response. The integrated flexure guide saves the cost of additional guiding systems when integrating these actuators.

PDF Brochure | Background Information on Piezo Flexure Actuators

P-290 long-travel piezoelectric Z nanopositioning flexure table / actuator

Custom Flexure Guided Nanopositoining Actuator for Vertical Motion

Flextensional Z-actuator with integrated double motion amplifier
1000 µm travel range in Z
Non-magnetic stainless steel option

This custom flexure actuator provides 1000 µm Z-travel. It was designed for high-resolution static and low-dynamic positioning applications.

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Piezo Flexure Actuator Brochure

Download the brochure for more information on flexure-guided and flextensional piezo linear actuators.

Download PDF Brochure More Piezo Flexure Stages and Nanopositioners